TY  - GEN
AU  - Nazarov, A. N.
AU  - Raskin, J.-P.
CN  - TK7871.85
ID  - 692741
KW  - Semiconductors
KW  - Silicon-on-insulator technology
KW  - Nanoelectromechanical systems
KW  - Nanotechnology
LK  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10817963
SN  - 9783038136156 
T1  - Nanoscaled semiconductor-on-insulator materials, sensors and devices :selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine 
TI  - Nanoscaled semiconductor-on-insulator materials, sensors and devices :selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine 
UR  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10817963
VL  - volume 276
ER  -