Poly-SiGe for MEMS-above-CMOS sensors [electronic resource] / Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw.

Acknowledgements
Abstract
Symbols and Abbreviations
Introduction
Poly-SiGe As Piezoresistive Material
Design of a Poly-SiGe Piezoresistive Pressure Sensor
The Pressure Sensor Fabrication Process
Sealing of Surface Micromachined Poly-SiGe Cavities
Characterization of Poly-SiGe pressure sensors
CMOS Integrated Poly-SiGe Piezoresistive Pressure Sensor
Conclusions And Future Work
Appendix A
Appendix B
Appendix C
Appendix D.