000695607 000__ 03247cam\a2200481Ki\4500 000695607 001__ 695607 000695607 005__ 20230306135448.0 000695607 006__ m\\\\\o\\d\\\\\\\\ 000695607 007__ cr\cnu|||unuuu 000695607 008__ 131016t20132014enka\\\\ob\\\\000\0\eng\d 000695607 020__ $$a9781447155416 $$qelectronic book 000695607 020__ $$a1447155416 $$qelectronic book 000695607 020__ $$z9781447155409 000695607 0247_ $$a10.1007/978-1-4471-5541-6$$2doi 000695607 035__ $$aSP(OCoLC)ocn860834964 000695607 035__ $$aSP(OCoLC)860834964 000695607 040__ $$aGW5XE$$beng$$erda$$epn$$cGW5XE$$dYDXCP$$dN$T$$dCOO$$dEBLCP 000695607 049__ $$aISEA 000695607 050_4 $$aTA1677 000695607 08204 $$a621.366$$223 000695607 1001_ $$aSugioka, Kōji,$$eauthor. 000695607 24510 $$aFemtosecond laser 3D micromachining for microfluidic and optofluidic applications$$h[electronic resource] /$$cKoji Sugioka, Ya Cheng. 000695607 264_1 $$aLondon :$$bSpringer,$$c[2013?] 000695607 264_4 $$c©2014 000695607 300__ $$a1 online resource (ix, 129 pages) :$$billustrations (some color). 000695607 336__ $$atext$$btxt$$2rdacontent 000695607 337__ $$acomputer$$bc$$2rdamedia 000695607 338__ $$aonline resource$$bcr$$2rdacarrier 000695607 4901_ $$aSpringerBriefs in Applied Sciences and Technology,$$x2191-530X 000695607 504__ $$aIncludes bibliographical references. 000695607 506__ $$aAccess limited to authorized users. 000695607 520__ $$aFemtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent to the femtosecond laser beam due to nonlinear multiphoton absorption. The multiphoton absorption allows us to perform not only surface but also three-dimensionally internal microfabrication of transparent materials such as glass. This capability makes it possible to directly fabricate three-dimensional microfludics, micromechanics, microelectronics, and microoptics embedded in the glass. Further, these microcomponents can be easily integrated in a single glass microchip by the simple procedure using the femtosecond laser. Thus, the femtosecond laser processing provides some advantages over conventional methods such as traditional semiconductor processing or soft lithography for fabrication of microfludic, optofludic, and lab-on-a-chip devices, and thereby many researches on this topic are currently being carried out. This book presents a comprehensive review on the state of the art and future prospects of femtosecond laser processing for fabrication of microfludics and optofludics including principle of femtosecond laser processing, detailed fabrication procedures of each microcomponent, and practical applications to biochemical analysis. 000695607 588__ $$aDescription based on online resource; title from PDF title page (SpringerLink, viewed October 1, 2013). 000695607 650_0 $$aFemtosecond lasers. 000695607 650_0 $$aLaser ablation. 000695607 650_0 $$aMicrofluidics. 000695607 650_0 $$aOptofluidics. 000695607 7001_ $$aCheng, Ya,$$eauthor. 000695607 830_0 $$aSpringerBriefs in applied sciences and technology,$$x2191-530X 000695607 85280 $$bebk$$hSpringerLink 000695607 85640 $$3SpringerLink$$uhttps://univsouthin.idm.oclc.org/login?url=http://dx.doi.org/10.1007/978-1-4471-5541-6$$zOnline Access 000695607 909CO $$ooai:library.usi.edu:695607$$pGLOBAL_SET 000695607 980__ $$aEBOOK 000695607 980__ $$aBIB 000695607 982__ $$aEbook 000695607 983__ $$aOnline 000695607 994__ $$a92$$bISE