Title
Novel optical technologies for nanofabrication [electronic resource] / Qian Liu, Xuanming Duan, Changsi Peng.
ISBN
9783642403873 electronic book
3642403875 electronic book
9783642403866
Published
Heidelberg : Springer, 2014.
Language
English
Description
1 online resource (ix, 267 pages) : illustrations (some color).
Item Number
10.1007/978-3-642-40387-3 doi
Call Number
T174.7
Dewey Decimal Classification
620.1/15
Summary
Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors' groups. It focuses on new techniques and methods as well as applications and development trends in laser nanofabrication, including super-resolution laser direct writing, surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons. This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques.
Bibliography, etc. Note
Includes bibliographical references.
Access Note
Access limited to authorized users.
Source of Description
Description based on online resource; title from PDF title page (SpringerLink, viewed November 4, 2013).
Series
Nanostructure science and technology, 1571-5744
Super-resolution Laser Direct Writing and Its Applications
Laser path-guided wrinkle structures
Laser Micro/Nanofabrication and Applications Based on Multiphoton Process
Laser Interference Nano-Fabrication
Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons
Mass production of large-format micro/nano-structure based optical devices.
