TY  - GEN
AU  - Khine, Lynn.
AU  - Tsai, Julius M.
CN  - TK7875
ID  - 703888
KW  - Nanoelectromechanical systems
KW  - Microelectromechanical systems
LK  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10817952
SN  - 9783038136095  
T1  - NEMS/MEMS technology and devicesselected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore /
TI  - NEMS/MEMS technology and devicesselected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore /
UR  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10817952
VL  - volume 254
ER  -