000703888 000__ 02334cam\a2200421\i\4500
000703888 001__ 703888
000703888 005__ 20210515095120.0
000703888 006__ m\\\\\o\\d\\\\\\\\
000703888 007__ cr\\u\nnnunnun||
000703888 008__ 110726t20112011sz\ad\\\ob\\\\101\0\eng\d
000703888 020__ $$z9783037851456 $$qpaperback
000703888 020__ $$z3037851457 $$qpaperback
000703888 020__ $$a9783038136095  $$qelectronic book
000703888 035__ $$a(CaPaEBR)ebr10817952
000703888 040__ $$aCaPaEBR$$beng$$erda$$epn$$cCaPaEBR
000703888 05014 $$aTK7875$$b.I538 2011eb
000703888 08204 $$a233$$223
000703888 1112_ $$aInternational Conference on Materials for Advanced Technologies$$d(2011 :$$cSingapore),$$jissuing body.
000703888 24510 $$aNEMS/MEMS technology and devices$$h[electronic resource] :$$bselected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore /$$cedited by Lynn Khine and Julius M. Tsai.
000703888 264_1 $$aDurnten-Zurich, Switzerland :$$bTrans Tech Publications,$$c[2011]
000703888 264_4 $$c©2011
000703888 300__ $$a1 online resource (233 pages) :$$billustrations (some color).
000703888 336__ $$atext$$2rdacontent
000703888 337__ $$acomputer$$2rdamedia
000703888 338__ $$aonline resource$$2rdacarrier
000703888 4901_ $$aAdvanced materials research,$$x1022-6680 ;$$vvolume 254
000703888 504__ $$aIncludes bibliographical references and indexes.
000703888 506__ $$aAccess limited to authorized users.
000703888 588__ $$aDescription based on print version record.
000703888 650_0 $$aNanoelectromechanical systems$$vCongresses.
000703888 650_0 $$aMicroelectromechanical systems$$vCongresses.
000703888 7001_ $$aKhine, Lynn.
000703888 7001_ $$aTsai, Julius M.
000703888 77608 $$iPrint version:$$aInternational Conference on Materials for Advanced Technologies.$$tNEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore.$$dDurnten-Zurich, Switzerland : Trans Tech Publications, [2011]$$kAdvanced materials research ; volume 254$$x1022-6680 ;$$z9783037851456$$w(OCoLC)ocn751790683$$w(DLC)10817952
000703888 830_0 $$aAdvanced materials research ;$$vv. 254.
000703888 852__ $$bebk
000703888 85640 $$3ProQuest Ebook Central Academic Complete$$uhttps://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10817952$$zOnline Access
000703888 909CO $$ooai:library.usi.edu:703888$$pGLOBAL_SET
000703888 980__ $$aEBOOK
000703888 980__ $$aBIB
000703888 982__ $$aEbook
000703888 983__ $$aOnline