TY - GEN T1 - Modern development in materials, machinery and automationselected, peer reviewed papers from the 2013 International Conference on Microtechnology and MEMS (ICMM 2013), May 22-23, 2013, Beijing, China / AU - Dai, Minli. VL - 346 CN - TA403.6 ID - 709401 KW - Materials KW - Automatic control SN - 9783038261469 TI - Modern development in materials, machinery and automationselected, peer reviewed papers from the 2013 International Conference on Microtechnology and MEMS (ICMM 2013), May 22-23, 2013, Beijing, China / LK - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10777760 UR - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10777760 ER -