Ion implantation and activation. Volume 3 [electronic resource] / Kunihiro Suzuki.
2013
QC702.7.I55 S89 2013eb
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Details
Title
Ion implantation and activation. Volume 3 [electronic resource] / Kunihiro Suzuki.
Author
ISBN
9781608057924 electronic book
9781608057146
9781608057146
Published
Sharjah : Bentham Science Publishers, 2013.
Language
English
Description
1 online resource (212 pages) : illustrations
Call Number
QC702.7.I55 S89 2013eb
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
Source of Description
Description based on online resource; title from PDF title page (ebrary, viewed January 12, 2014).
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