TY  - GEN
AU  - Vilaithong, Thiraphat.
AU  - Boonyawan, D.
AU  - Thongbai, C.
CN  - QC793.3.B4
ID  - 714892
KW  - Plasma engineering
LK  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10828918
SN  - 9783038130284
T1  - Particle beams & plasma interaction on materials and ion & plasma finishing 2004proceedings of PIM & ASIP 2004, 25-27 November 2004, Chiang Mai, Thailand /
TI  - Particle beams & plasma interaction on materials and ion & plasma finishing 2004proceedings of PIM & ASIP 2004, 25-27 November 2004, Chiang Mai, Thailand /
UR  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10828918
VL  - volume 107
ER  -