@article{719295, recid = {719295}, author = {Claverie, A.}, title = {Transmission electron microscopy in micro-nanoelectronics [electronic resource] /}, publisher = {John Wiley &Sons, Inc., ;}, address = {Hoboken, N.J. :}, pages = {xiii, 243 p. :}, year = {2013}, url = {http://library.usi.edu/record/719295}, }