Silicon technologies [electronic resource] : ion implantation and thermal treatment / edited by Annie Baudrant.
2011
TK7871.85 .S5485 2011eb
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Title
Silicon technologies [electronic resource] : ion implantation and thermal treatment / edited by Annie Baudrant.
ISBN
9781848212312
1848212313
9781118601112 electronic book
1848212313
9781118601112 electronic book
Publication Details
London : ISTE ; Hoboken, N.J. : Wiley, 2011.
Language
English
Description
xvii, 337 p. : ill.
Call Number
TK7871.85 .S5485 2011eb
Dewey Decimal Classification
621.3815/2
Summary
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
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