Material science and MEMS production [electronic resource] : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China / edited by Changhui Liu.
2014
TK7875 .M384 2014eb
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Details
Title
Material science and MEMS production [electronic resource] : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China / edited by Changhui Liu.
ISBN
9783038350477
9783038264286 electronic book
9783038264286 electronic book
Published
Zurich, Switzerland : TTP, 2014.
Copyright
©2014
Language
English
Description
1 online resource (117 pages) : illustrations (some color), graphs, photographs.
Call Number
TK7875 .M384 2014eb
Dewey Decimal Classification
621.381
Bibliography, etc. Note
Includes bibliographical references at the end of each chapters and indexes.
Access Note
Access limited to authorized users.
Source of Description
Description based on online resource; title from PDF title page (ebrary, viewed March 20, 2014).
Added Author
Series
Advanced materials research ; Volume 901.
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