@article{723429,
      author = {Prorok, Barton C.,},
      url = {http://library.usi.edu/record/723429},
      title = {MEMS and nanotechnology. Proceedings of the 2014 Annual  Conference on Experimental and Applied Mechanics /, Volume  8 [electronic resource] :. Annual Conference on  Experimental and Applied Mechanics},
      doi = {https://doi.org/10.1007/978-3-319-07004-9},
      recid = {723429},
      pages = {1 online resource.},
}