TY  - GEN
DO  - 10.1007/978-3-319-07004-9
DO  - doi
T1  - MEMS and nanotechnology.Proceedings of the 2014 Annual Conference on Experimental and Applied Mechanics /
AU  - Prorok, Barton C.,
CN  - T174.7
ID  - 723429
KW  - Nanotechnology
KW  - Microelectromechanical systems
KW  - Mechanics, Applied
SN  - 9783319070049
SN  - 3319070045
TI  - MEMS and nanotechnology.Proceedings of the 2014 Annual Conference on Experimental and Applied Mechanics /
LK  - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-319-07004-9
UR  - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-319-07004-9
ER  -