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Table of Contents
Preface; Contents; Chapter 1: Introduction; 1.1 Coating Processes Compatible with High-Voltage Devices; 1.2 Monograph Overview; 1.3 Plasma Diagnostics and Measurements; 1.4 Process Control Considerations; 1.5 Monograph Organization; References; Part I: Vacuum Systems Infrastructure and Chamber Design; Chapter 2: Vacuum Chamber Design; 2.1 Introduction; 2.2 Vacuum Chamber Design Considerations; 2.3 Chamber Material Selection; 2.3.1 Material Outgassing; 2.3.2 Vacuum Welds, Gaskets, and Attachments; 2.3.3 Vacuum Chamber Isolation; 2.4 Vacuum Components Selection; 2.4.1 High-Vacuum Pumping System
2.4.2 Vacuum Measurement System Selection2.4.3 Vacuum System Safety Interlocks; 2.5 Case Study: Chamber Vibration Isolation and Measurement; 2.5.1 Vibration Transmissibility Design; 2.5.2 Accelerometer Response Comparison; 2.6 Case Study Continued: Optimum Chamber Design; 2.6.1 Design Optimization Analysis; 2.6.2 Compare Optimum Designs; 2.7 Assembly and Cleaning; 2.8 Residual Gas Analysis; 2.8.1 Establishing Chamber Baseline; 2.8.2 Helium Leak Check; 2.9 System Commissioning; References; Chapter 3: Rolling Contact Testing of Ball Bearing Elements; 3.1 Introduction
3.2 Analysis of Rolling Contact in Vacuum3.2.1 Calculations of Contact Stress; 3.2.2 Contact Load Versus Cycles; 3.3 Rolling Contact Wear; 3.3.1 Empirical Approach; 3.3.2 Thermodynamic Approach to Friction and Wear; References; Chapter 4: Rolling Contact Fatigue in High Vacuum; 4.1 Introduction; 4.2 Rolling Contact Fatigue Test Platform; 4.2.1 Test Configuration in Oil; 4.2.2 Test Configuration in Vacuum; 4.2.3 Rolling Elements in Vacuum; 4.3 Rolling Contact Fatigue Vacuum Test; 4.3.1 Coated Rolling Elements in Vacuum; 4.3.2 Test Assembly in Vacuum Chamber; 4.3.3 RCF Test Failure Criterion
4.3.4 Analysis Tools4.3.5 RCF Test Results; 4.3.6 Post-Test Autopsy of Contacting Elements; 4.3.7 Post-Test Elemental Content of Film; 4.4 Friction and Wear Calculations; 4.4.1 Third-Body Transfer Mechanism; 4.4.2 Empirical Comparison: Lundberg-Palmgren Model; Conclusions and Observations; References; Chapter 5: Coating Thickness Calculation and Adhesion; 5.1 Thickness Measurement Techniques; 5.1.1 Calculate Thickness by Weight; 5.1.2 Thickness Measurement Using XRF Spectrometry; 5.2 Pretest Adhesion Check; 5.2.1 Scratch Test Ball Sample; 5.2.2 Particulate Detection Tape Testing
5.3 Closing CommentsReferences; Part II: Simulation and Testing of Thin Films in a Vacuum Environment; Chapter 6: Ion-Plating Process Model; 6.1 Plasma and Deposition Processes; 6.2 Postdeposition Fatigue Testing; 6.3 Plasma-Assisted Deposition; 6.4 Coating Procedure for RCF Testings; 6.5 Plasma Effects on Coating Thickness; 6.6 Analysis of Extreme DoE Coating Tests; 6.7 RCF Testing of Extreme DoE Coated Balls; 6.8 Ion-Plating Model in SimulinkTM; 6.8.1 Cathode dc-Sheath Model; 6.8.2 Sputter and Evaporation-Sputter Deposition Models; 6.8.3 Elements of the Ion-Plating Simulation Model
2.4.2 Vacuum Measurement System Selection2.4.3 Vacuum System Safety Interlocks; 2.5 Case Study: Chamber Vibration Isolation and Measurement; 2.5.1 Vibration Transmissibility Design; 2.5.2 Accelerometer Response Comparison; 2.6 Case Study Continued: Optimum Chamber Design; 2.6.1 Design Optimization Analysis; 2.6.2 Compare Optimum Designs; 2.7 Assembly and Cleaning; 2.8 Residual Gas Analysis; 2.8.1 Establishing Chamber Baseline; 2.8.2 Helium Leak Check; 2.9 System Commissioning; References; Chapter 3: Rolling Contact Testing of Ball Bearing Elements; 3.1 Introduction
3.2 Analysis of Rolling Contact in Vacuum3.2.1 Calculations of Contact Stress; 3.2.2 Contact Load Versus Cycles; 3.3 Rolling Contact Wear; 3.3.1 Empirical Approach; 3.3.2 Thermodynamic Approach to Friction and Wear; References; Chapter 4: Rolling Contact Fatigue in High Vacuum; 4.1 Introduction; 4.2 Rolling Contact Fatigue Test Platform; 4.2.1 Test Configuration in Oil; 4.2.2 Test Configuration in Vacuum; 4.2.3 Rolling Elements in Vacuum; 4.3 Rolling Contact Fatigue Vacuum Test; 4.3.1 Coated Rolling Elements in Vacuum; 4.3.2 Test Assembly in Vacuum Chamber; 4.3.3 RCF Test Failure Criterion
4.3.4 Analysis Tools4.3.5 RCF Test Results; 4.3.6 Post-Test Autopsy of Contacting Elements; 4.3.7 Post-Test Elemental Content of Film; 4.4 Friction and Wear Calculations; 4.4.1 Third-Body Transfer Mechanism; 4.4.2 Empirical Comparison: Lundberg-Palmgren Model; Conclusions and Observations; References; Chapter 5: Coating Thickness Calculation and Adhesion; 5.1 Thickness Measurement Techniques; 5.1.1 Calculate Thickness by Weight; 5.1.2 Thickness Measurement Using XRF Spectrometry; 5.2 Pretest Adhesion Check; 5.2.1 Scratch Test Ball Sample; 5.2.2 Particulate Detection Tape Testing
5.3 Closing CommentsReferences; Part II: Simulation and Testing of Thin Films in a Vacuum Environment; Chapter 6: Ion-Plating Process Model; 6.1 Plasma and Deposition Processes; 6.2 Postdeposition Fatigue Testing; 6.3 Plasma-Assisted Deposition; 6.4 Coating Procedure for RCF Testings; 6.5 Plasma Effects on Coating Thickness; 6.6 Analysis of Extreme DoE Coating Tests; 6.7 RCF Testing of Extreme DoE Coated Balls; 6.8 Ion-Plating Model in SimulinkTM; 6.8.1 Cathode dc-Sheath Model; 6.8.2 Sputter and Evaporation-Sputter Deposition Models; 6.8.3 Elements of the Ion-Plating Simulation Model