@article{727001,
      note = {Includes index.},
      author = {Frey, Hartmut, and Khan, H. R.,},
      url = {http://library.usi.edu/record/727001},
      title = {Handbook of thin film technology [electronic resource] /},
      doi = {https://doi.org/10.1007/978-3-642-05430-3},
      recid = {727001},
      pages = {1 online resource.},
}