TY  - GEN
DO  - 10.1007/978-3-642-05430-3
DO  - doi
T1  - Handbook of thin film technology
AU  - Frey, Hartmut,
AU  - Khan, H. R.,
CN  - TA418.9.T45
N1  - Includes index.
ID  - 727001
KW  - Thin films
SN  - 9783642054303
SN  - 3642054307
TI  - Handbook of thin film technology
LK  - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-642-05430-3
UR  - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-642-05430-3
ER  -