000727001 000__ 02166cam\a2200445Ii\4500
000727001 001__ 727001
000727001 005__ 20230306140847.0
000727001 006__ m\\\\\o\\d\\\\\\\\
000727001 007__ cr\cn\nnnunnun
000727001 008__ 150511s2015\\\\gw\\\\\\of\\\\001\0\eng\d
000727001 020__ $$a9783642054303$$qelectronic book
000727001 020__ $$a3642054307$$qelectronic book
000727001 020__ $$z9783642054297
000727001 020__ $$z3642054293
000727001 0247_ $$a10.1007/978-3-642-05430-3$$2doi
000727001 02852 $$a11009184
000727001 035__ $$aSP(OCoLC)ocn908685950
000727001 035__ $$aSP(OCoLC)908685950
000727001 040__ $$aN$T$$beng$$erda$$epn$$cN$T$$dGW5XE$$dN$T$$dIDEBK$$dYDXCP$$dE7B$$dNUI$$dCOO$$dVLB
000727001 049__ $$aISEA
000727001 050_4 $$aTA418.9.T45$$bH35 2015eb
000727001 08204 $$a621.38152$$223
000727001 24500 $$aHandbook of thin film technology$$h[electronic resource] /$$cHartmut Frey, H.R. Khan, editors.
000727001 264_1 $$aBerlin :$$bSpringer,$$c2015.
000727001 300__ $$a1 online resource.
000727001 336__ $$atext$$btxt$$2rdacontent
000727001 337__ $$acomputer$$bc$$2rdamedia
000727001 338__ $$aonline resource$$bcr$$2rdacarrier
000727001 500__ $$aIncludes index.
000727001 5050_ $$aApplications and developments of thin film technology -- Importance of the vacuum technology for thin film coatings -- Evaporation in the vacuum -- Basic principle of plasma physics -- Gaseous phase and surface processes -- Coating by cathode sputtering -- Plasma treatment methods -- Ion beam-supported procedures -- Chemical Vapor Deposition (CVD) -- Physical basics of modern methods of surface and thin film analysis -- Measurements of thin layers during the coating -- Measurements of thin layers after terminated coating process -- Nanoparticle Films -- Optical properties of thin films.
000727001 506__ $$aAccess limited to authorized users.
000727001 588__ $$aDescription based on print version record.
000727001 650_0 $$aThin films$$vHandbooks, manuals, etc.
000727001 7001_ $$aFrey, Hartmut,$$eeditor.
000727001 7001_ $$aKhan, H. R.,$$eeditor.
000727001 77608 $$iPrint version:$$aFrey, Hartmut.$$tHandbook of thin film technology$$z9783642054297$$w(OCoLC)499067581
000727001 852__ $$bebk
000727001 85640 $$3SpringerLink$$uhttps://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-642-05430-3$$zOnline Access$$91397441.1
000727001 909CO $$ooai:library.usi.edu:727001$$pGLOBAL_SET
000727001 980__ $$aEBOOK
000727001 980__ $$aBIB
000727001 982__ $$aEbook
000727001 983__ $$aOnline
000727001 994__ $$a92$$bISE