TY  - GEN
T1  - Hermeticity testing of MEMS and microelectronic packages
AU  - Costello, Suzanne,
AU  - Desmulliez, Marc P. Y.,
CN  - Ebrary Academic Complete
CN  - TK7875
ID  - 731653
KW  - Microelectromechanical systems.
KW  - Microelectronics.
KW  - Microelectromechanical systems
KW  - Microelectronics
SN  - 9781608075287
TI  - Hermeticity testing of MEMS and microelectronic packages
LK  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=11069355
UR  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=11069355
ER  -