Handbook of 3D integration. Volume 3, 3D process technology [electronic resource] / edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors.
Garrou, Philip, editor.; Koyanagi, Mitsumasa, editor.; Ramm, Peter, editor.; Allen, Ricky, contributor.
2014
TK7874 .H363 2014eb
Available Online

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Title
Handbook of 3D integration. Volume 3, 3D process technology [electronic resource] / edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors.
ISBN
9783527334667
9783527670130 electronic book
9783527670123 electronic book
9783527670116 electronic book
9783527670109 electronic book
Published
Weinheim, Germany : Wiley-VCH, 2014.
Copyright
©2014
Language
English
Description
1 online resource (475 pages) : illustrations.
Call Number
TK7874 .H363 2014eb
Dewey Decimal Classification
621.3815
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
Source of Description
Description based on online resource; title from PDF title page (ebrary, viewed May 5, 2014).
Added Author
Garrou, Philip, editor.
Koyanagi, Mitsumasa, editor.
Ramm, Peter, editor.
Allen, Ricky, contributor.
Available in Other Form
Handbook of 3D integration. Volume 3, 3D process technology.
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Online Access
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Online Resources > Ebooks
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