Resonant MEMS [electronic resource] : fundamentals, implementation and application / edited by Oliver Brand [and three others].
2015
TK7875 .R476 2015eb
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Title
Resonant MEMS [electronic resource] : fundamentals, implementation and application / edited by Oliver Brand [and three others].
ISBN
9783527335459
9783527676361 electronic book
9783527676361 electronic book
Published
Weinheim, Baden-Württemberg, Germany : Wiley-VCH, 2015.
Copyright
©2015
Language
English
Description
1 online resource (512 pages) : illustrations, graphs.
Call Number
TK7875 .R476 2015eb
Dewey Decimal Classification
621.381
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
Source of Description
Description based on online resource; title from PDF title page (ebrary, viewed May 21, 2015).
Added Author
Series
Advanced micro & nanosystems.
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