TY  - GEN
N2  - This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
DO  - 10.1007/978-3-662-48816-4
DO  - doi
AB  - This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
T1  - Micro/nano integrated fabrication technology and its applications in microenergy harvesting
DA  - 2016.
CY  - Berlin :
AU  - Zhang, Xiao-Sheng,
CN  - T174.7
PB  - Springer,
PP  - Berlin :
PY  - 2016.
N1  - "Doctoral thesis accepted by Peking University, Beijing, China."
ID  - 752732
KW  - Nanotechnology.
KW  - Nanostructures.
KW  - Biomimetic materials.
SN  - 9783662488164
SN  - 3662488167
TI  - Micro/nano integrated fabrication technology and its applications in microenergy harvesting
LK  - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-662-48816-4
UR  - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-662-48816-4
ER  -