000752732 000__ 05745cam\a2200553Ii\4500
000752732 001__ 752732
000752732 005__ 20230306141430.0
000752732 006__ m\\\\\o\\d\\\\\\\\
000752732 007__ cr\un\nnnunnun
000752732 008__ 151208s2016\\\\gw\\\\\\ob\\\\000\0\eng\d
000752732 019__ $$a932334476
000752732 020__ $$a9783662488164$$q(electronic book)
000752732 020__ $$a3662488167$$q(electronic book)
000752732 020__ $$z9783662488140
000752732 020__ $$z3662488140
000752732 0247_ $$a10.1007/978-3-662-48816-4$$2doi
000752732 035__ $$aSP(OCoLC)ocn931807186
000752732 035__ $$aSP(OCoLC)931807186$$z(OCoLC)932334476
000752732 040__ $$aYDXCP$$beng$$epn$$cYDXCP$$dN$T$$dIDEBK$$dN$T$$dOCLCF$$dEBLCP$$dDEBSZ$$dNUI$$dCOO$$dOCLCQ$$dGW5XE
000752732 049__ $$aISEA
000752732 050_4 $$aT174.7
000752732 08204 $$a620/.5$$223
000752732 1001_ $$aZhang, Xiao-Sheng,$$eauthor.
000752732 24510 $$aMicro/nano integrated fabrication technology and its applications in microenergy harvesting$$h[electronic resource] /$$cXiao-Sheng Zhang.
000752732 260__ $$aBerlin :$$bSpringer,$$c2016.
000752732 300__ $$a1 online resource.
000752732 336__ $$atext$$btxt$$2rdacontent
000752732 337__ $$acomputer$$bc$$2rdamedia
000752732 338__ $$aonline resource$$bcr$$2rdacarrier
000752732 4901_ $$aSpringer theses
000752732 500__ $$a"Doctoral thesis accepted by Peking University, Beijing, China."
000752732 504__ $$aIncludes bibliographical references.
000752732 5050_ $$aSupervisor's Foreword; Abstract; Acknowledgments; Contents; Abbreviations; 1 Introduction; Abstract ; 1.1 Micro-Nanohierarchical Structures in Nature; 1.2 Artificial Micro-Nanohierarchical Structures; 1.2.1 The Progress of Bottom-Up Method; 1.2.2 The Progress of Top-Down Method; 1.3 The Development Progress of Microenergy Field; 1.3.1 Microenergy Technology; 1.3.2 Nanogenerator; 1.3.3 Triboelectric Nanogenerator; 1.4 Research Purpose and Content; 1.4.1 Research Purpose; 1.4.2 Research Content; References; 2 Micro-Nanointegrated Fabrication Technique for Silicon; Abstract.
000752732 5058_ $$a2.1 Nanoforest Fabrication Based on an Improved DRIE Process2.1.1 Deep Reactive-Ion Etching (DRIE) Process; 2.1.2 Nanostructuring by an Improved DRIE Process; 2.1.3 Mechanism of Controllable Formation of Nanostructures; 2.2 Fabrication of Si-based Micro-Nanohierarchical Structures; 2.2.1 Structural Design; 2.2.2 Fabrication Process; 2.2.3 Characterization and Analysis of Micro-NanoHierarchical Structures; 2.3 Interaction of Multiscale Structures Based on Silicon; 2.4 Properties of Si-Based Micro-NanoHierarchical Structures; 2.4.1 Anti-reflective Property; 2.4.2 Super-hydrophobic Property.
000752732 5058_ $$a2.5 ConclusionsReferences; 3 Micro-Nanointegrated Fabrication Technique for Flexible Materials; Abstract ; 3.1 Replication Process and Surface-Energy Control; 3.1.1 Replication Process Based on Silicon Mold; 3.1.2 Controllable Fabrication of Ultra-Low-Surface-Energy Silicon Mold; 3.2 Micro-Nanohierarchical Structures Based on PDMS; 3.2.1 Brief Introduction of PDMS; 3.2.2 Single-Step Fabrication of Micro-Nanohierarchical Structures on PDMS; 3.2.3 Key Factors of Single-Step Replication Process; 3.2.4 Effect of Process Parameters on Surface Properties of PDMS.
000752732 5058_ $$a3.3 Micro-Nanohierarchical Structures Based on Parylene-C3.3.1 Fabrication and Method; 3.3.2 The Properties of Fabricated MNHS Parylene-C Films; 3.4 The Interaction of Multiscale Structures on Flexible Materials; 3.5 The Surface Modification Based on Post-DRIE Process; 3.5.1 Fluorocarbon Plasma Treatment Based on Post-DRIE Process; 3.5.2 The Mechanism of Enhancing Hydrophobicity by Using Post-DRIE Process; 3.6 Conclusions; References; 4 Flexible Triboelectric Nanogenerators: Principle and Fabrication; Abstract ; 4.1 Working Principle of TENG; 4.2 Design of Flexible Sandwich-Shaped TENG.
000752732 5058_ $$a4.2.1 Structural Geometry and Surface Profile4.2.2 Theoretical Analysis; 4.2.3 Finite Element Simulation; 4.3 Fabrication of the Sandwich-Shaped TENG; 4.4 Electric Properties Test and Analysis of the Sandwich-Shaped TENG; 4.4.1 Test System and Brief Results; 4.4.2 Frequency Effect of External Force on TENG; 4.4.3 Structural Effect on TENG; 4.4.4 Powering Ability for Practical Applications; 4.5 Conclusions; References; 5 Flexible Triboelectric Nanogenerators: Enhancement and Applications; Abstract ; 5.1 Enhancement of TENG Based on Single-Step Fluorocarbon Plasma Treatment.
000752732 506__ $$aAccess limited to authorized users.
000752732 520__ $$aThis book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
000752732 588__ $$aOnline resource; title from PDF title page (viewed December 30, 2015).
000752732 650_0 $$aNanotechnology.
000752732 650_0 $$aNanostructures.
000752732 650_0 $$aBiomimetic materials.
000752732 77608 $$iPrint version:$$aZhang, Xiao-Sheng.$$tMicro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting.$$dBerlin, Heidelberg : Springer Berlin Heidelberg, ©2015$$z9783662488140
000752732 830_0 $$aSpringer theses.
000752732 852__ $$bebk
000752732 85640 $$3SpringerLink$$uhttps://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-662-48816-4$$zOnline Access$$91397441.1
000752732 909CO $$ooai:library.usi.edu:752732$$pGLOBAL_SET
000752732 980__ $$aEBOOK
000752732 980__ $$aBIB
000752732 982__ $$aEbook
000752732 983__ $$aOnline
000752732 994__ $$a92$$bISE