TY  - GEN
N2  - This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
DO  - 10.1007/978-3-319-23853-1
DO  - doi
AB  - This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
T1  - Nanopositioning technologiesfundamentals and applications /
DA  - ©2016.
CY  - Cham :
AU  - Ru, Changhai.
AU  - Liu, Xinyu
AU  - Sun, Yu,
CN  - TK7875
PB  - Springer,
PP  - Cham :
PY  - ©2016.
ID  - 753164
KW  - Nanoelectromechanical systems.
SN  - 9783319238531
SN  - 3319238531
TI  - Nanopositioning technologiesfundamentals and applications /
LK  - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-319-23853-1
UR  - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-319-23853-1
ER  -