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000753164 019__ $$a933591220$$a935252251
000753164 020__ $$a9783319238531$$q(electronic book)
000753164 020__ $$a3319238531$$q(electronic book)
000753164 020__ $$z9783319238524
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000753164 0247_ $$a10.1007/978-3-319-23853-1$$2doi
000753164 035__ $$aSP(OCoLC)ocn933587310
000753164 035__ $$aSP(OCoLC)933587310$$z(OCoLC)933591220$$z(OCoLC)935252251
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000753164 24500 $$aNanopositioning technologies$$h[electronic resource] :$$bfundamentals and applications /$$cChanghai Ru, Xinyu Liu, Yu Sun, editors.
000753164 260__ $$aCham :$$bSpringer,$$c©2016.
000753164 300__ $$a1 online resource.
000753164 336__ $$atext$$btxt$$2rdacontent
000753164 337__ $$acomputer$$bc$$2rdamedia
000753164 338__ $$aonline resource$$bcr$$2rdacarrier
000753164 504__ $$aReferences3 Mechanical Design of High-Speed Nanopositioning Systems; 3.1 Introduction; 3.2 Scanning Probe Microscopy; 3.3 Flexure-Guided Nanopositioner; 3.4 Design Considerations; 3.4.1 Flexure Hinges; 3.4.1.1 Commonly Used Flexure Hinges in Nanopositioning; 3.4.1.2 Boundary Conditions of Flexures; 3.4.1.3 Commonly Used Flexures in MEMS; 3.4.1.4 Finite-Element-Analysis; 3.4.2 Piezoelectric Stack Actuators; 3.4.2.1 Comparison of Piezo-Stack Actuated Nanopositioners; 3.4.2.2 Preloading; 3.4.2.3 Travel Range; 3.4.2.4 Self-Heating; 3.4.2.5 Electrical Considerations; 3.4.3 Material Considerations
000753164 5050_ $$a1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology -- A Review -- 3. Design of High-speed Nanopositioning Systems -- 4. Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5. Electro-magnetic Nano Positioning -- 6. Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8. Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10. Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.
000753164 506__ $$aAccess limited to authorized users.
000753164 520__ $$aThis book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
000753164 588__ $$aDescription based on print version record.
000753164 650_0 $$aNanoelectromechanical systems.
000753164 7001_ $$aRu, Changhai.
000753164 7001_ $$aLiu, Xinyu$$c(Mechanical engineer)
000753164 7001_ $$aSun, Yu,$$d1974-
000753164 77608 $$iPrint version:$$z9783319238524
000753164 852__ $$bebk
000753164 85640 $$3SpringerLink$$uhttps://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-319-23853-1$$zOnline Access$$91397441.1
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000753164 980__ $$aEBOOK
000753164 980__ $$aBIB
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