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Table of Contents
Introduction
Surface Recombination Theory
Al2O3 Deposition and Characterisation
Electrical Properties of the Si..Al2O3 Interface
Influence of Deposition Parameters.-Effect of Post-Deposition Thermal Processing- Effect of Surface Dopant Concentration
Effect of Surface Orientation and Morphology
Relationship Between Al2O3 Bulk and Interface Properties
Conclusion.
Surface Recombination Theory
Al2O3 Deposition and Characterisation
Electrical Properties of the Si..Al2O3 Interface
Influence of Deposition Parameters.-Effect of Post-Deposition Thermal Processing- Effect of Surface Dopant Concentration
Effect of Surface Orientation and Morphology
Relationship Between Al2O3 Bulk and Interface Properties
Conclusion.