@article{755322,
      note = {Includes index.},
      author = {Elfadel, Ibrahim M. and Fettweis, Gerhard P.,},
      url = {http://library.usi.edu/record/755322},
      title = {3D stacked chips from emerging processes to heterogeneous  systems / [electronic resource] :},
      recid = {755322},
      pages = {1 online resource (xxiii, 339 pages) :},
}