TY - GEN N2 - The thesis presents the first direct observations of the 3D-shape, size and electrical properties of nanoscale filaments, made possible by a new Scanning Probe Microscopy-based tomography technique referred to as scalpel SPM. Using this innovative technology and nm-scale observations, the author achieves essential insights into the filament formation mechanisms, improves the understanding required for device optimization, and experimentally observes phenomena that had previously been only theoretically proposed. . AB - The thesis presents the first direct observations of the 3D-shape, size and electrical properties of nanoscale filaments, made possible by a new Scanning Probe Microscopy-based tomography technique referred to as scalpel SPM. Using this innovative technology and nm-scale observations, the author achieves essential insights into the filament formation mechanisms, improves the understanding required for device optimization, and experimentally observes phenomena that had previously been only theoretically proposed. . T1 - Metrology and physical mechanisms in new generation ionic devices AU - Celano, Umberto, CN - QC176.83 N1 - "Doctoral thesis accepted by the KU Leuven and IMEC, Belgium." ID - 755984 KW - Thin films. KW - Electronic apparatus and appliances. KW - Metrology. KW - Nonvolatile random-access memory. SN - 9783319395319 SN - 3319395319 TI - Metrology and physical mechanisms in new generation ionic devices LK - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-319-39531-9 UR - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-319-39531-9 ER -