000758602 000__ 01512cam\a22003731i\4500
000758602 001__ 758602
000758602 005__ 20210515120156.0
000758602 006__ m\\\\\o\\d\\\\\\\\
000758602 007__ cr\cn\nnnunnun
000758602 008__ 131209s2014\\\\enka\\\\ob\\\\001\0\eng\d
000758602 020__ $$a9780815519874$$q(electronic book)
000758602 020__ $$z9780815515937
000758602 035__ $$a(CaPaEBR)ebr10800153
000758602 040__ $$aCaPaEBR$$beng$$erda$$epn$$cCaPaEBR
000758602 05014 $$aTK7871$$b.S37 2012eb
000758602 08204 $$a621.381$$222
000758602 1001_ $$aSarkar, Jaydeep.
000758602 24510 $$aSputtering materials for VLSI and thin film devices$$h[electronic resource] /$$cby Jaydeep Sarkar.
000758602 250__ $$aFirst edition.
000758602 264_1 $$aOxford ;$$aBoston :$$bWilliam Andrew Publishing,$$c2014.
000758602 300__ $$a1 online resource (614 pages) :$$billustrations
000758602 336__ $$atext$$2rdacontent
000758602 337__ $$acomputer$$2rdamedia
000758602 338__ $$aonline resource$$2rdacarrier
000758602 504__ $$aIncludes bibliographical references and index.
000758602 506__ $$aAccess limited to authorized users.
000758602 588__ $$aDescription based on print version record.
000758602 650_0 $$aMicroelectronics$$xMaterials.
000758602 650_0 $$aFlat panel displays$$xMaterials.
000758602 650_0 $$aSputtering (Physics)
000758602 77608 $$iPrint version:$$aSarkar, Jaydeep.$$tSputtering materials for VLSI and thin film devices.$$dOxford : William Andrew Publishing, 2014$$z9780815515937
000758602 852__ $$bebk
000758602 85640 $$3ProQuest Ebook Central Academic Complete$$uhttps://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10800153$$zOnline Access
000758602 909CO $$ooai:library.usi.edu:758602$$pGLOBAL_SET
000758602 980__ $$aEBOOK
000758602 980__ $$aBIB
000758602 982__ $$aEbook
000758602 983__ $$aOnline