Sputtering materials for VLSI and thin film devices [electronic resource] / by Jaydeep Sarkar.
2014
TK7871 .S37 2012eb
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Title
Sputtering materials for VLSI and thin film devices [electronic resource] / by Jaydeep Sarkar.
Author
Edition
First edition.
ISBN
9780815519874 (electronic book)
9780815515937
9780815515937
Published
Oxford ; Boston : William Andrew Publishing, 2014.
Language
English
Description
1 online resource (614 pages) : illustrations
Call Number
TK7871 .S37 2012eb
Dewey Decimal Classification
621.381
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
Source of Description
Description based on print version record.
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