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000763362 019__ $$a962124926
000763362 020__ $$a9783319419909$$q(electronic book)
000763362 020__ $$a3319419900$$q(electronic book)
000763362 020__ $$z9783319419886
000763362 0247_ $$a10.1007/978-3-319-41990-9$$2doi
000763362 035__ $$aSP(OCoLC)ocn960643081
000763362 035__ $$aSP(OCoLC)960643081$$z(OCoLC)962124926
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000763362 049__ $$aISEA
000763362 050_4 $$aQH212.F5
000763362 08204 $$a578.1$$223
000763362 24500 $$aHelium ion microscopy /$$cGregor Hlawacek, Armin Gölzhäuser, editors.
000763362 264_1 $$aSwitzerland :$$bSpringer,$$c2016.
000763362 300__ $$a1 online resource (xxiii, 526 pages) :$$billustrations.
000763362 336__ $$atext$$btxt$$2rdacontent
000763362 337__ $$acomputer$$bc$$2rdamedia
000763362 338__ $$aonline resource$$bcr$$2rdacarrier
000763362 4901_ $$aNanoScience and technology,$$x1434-4904
000763362 504__ $$aIncludes bibliographical references and index.
000763362 506__ $$aAccess limited to authorized users.
000763362 520__ $$aThis book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.
000763362 588__ $$aOnline resource; title from PDF title page (SpringerLink, viewed October 13, 2016).
000763362 650_0 $$aField ion microscopy.
000763362 650_0 $$aHelium ions.
000763362 650_0 $$aIon bombardment.
000763362 7001_ $$aHlawacek, Gregor,$$eeditor.
000763362 7001_ $$aGölzhäuser, Armin,$$eeditor.
000763362 830_0 $$aNanoscience and technology.
000763362 852__ $$bebk
000763362 85640 $$3SpringerLink$$uhttps://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-319-41990-9$$zOnline Access$$91397441.1
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000763362 980__ $$aEBOOK
000763362 980__ $$aBIB
000763362 982__ $$aEbook
000763362 983__ $$aOnline
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