@article{764677,
      author = {Hoffman, Dorothy M., and Singh, Bawa. and Thomas, John H.},
      url = {http://library.usi.edu/record/764677},
      title = {Handbook of vacuum science and technology [electronic  resource] /},
      publisher = {Academic Press,},
      recid = {764677},
      pages = {xxii, 835 p. :},
      address = {San Diego, CA :},
      year = {1998},
}