TY  - GEN
AU  - Hoffman, Dorothy M.,
AU  - Singh, Bawa.
AU  - Thomas, John H.
CN  - TJ940
CY  - San Diego, CA :
DA  - c1998.
ID  - 764677
KW  - Vacuum technology
KW  - Mechanical engineering.
LK  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10201808
PB  - Academic Press,
PP  - San Diego, CA :
PY  - c1998.
T1  - Handbook of vacuum science and technology
TI  - Handbook of vacuum science and technology
UR  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10201808
ER  -