TY - GEN T1 - Handbook of vacuum science and technology DA - c1998. CY - San Diego, CA : AU - Hoffman, Dorothy M., AU - Singh, Bawa. AU - Thomas, John H. CN - TJ940 PB - Academic Press, PP - San Diego, CA : PY - c1998. ID - 764677 KW - Vacuum technology KW - Mechanical engineering. TI - Handbook of vacuum science and technology LK - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10201808 UR - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10201808 ER -