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000764677 010__ $$z   97026269 
000764677 020__ $$z9780123520654
000764677 020__ $$z0123520657
000764677 035__ $$a(CaPaEBR)ebr10201808
000764677 035__ $$a(OCoLC)162128757
000764677 040__ $$aCaPaEBR$$cCaPaEBR
000764677 05014 $$aTJ940$$b.H59 1998eb
000764677 24500 $$aHandbook of vacuum science and technology$$h[electronic resource] /$$cedited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III.
000764677 260__ $$aSan Diego, CA :$$bAcademic Press,$$cc1998.
000764677 300__ $$axxii, 835 p. :$$bill.
000764677 504__ $$aIncludes bibliographical references and index.
000764677 506__ $$aAccess limited to authorized users.
000764677 650_0 $$aVacuum technology$$vHandbooks, manuals, etc.
000764677 650_0 $$aMechanical engineering.
000764677 7001_ $$aHoffman, Dorothy M.,$$dd. 1996.
000764677 7001_ $$aSingh, Bawa.
000764677 7001_ $$aThomas, John H.
000764677 852__ $$bebk
000764677 85640 $$3ProQuest Ebook Central Academic Complete$$uhttps://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10201808$$zOnline Access
000764677 909CO $$ooai:library.usi.edu:764677$$pGLOBAL_SET
000764677 980__ $$aEBOOK
000764677 980__ $$aBIB
000764677 982__ $$aEbook
000764677 983__ $$aOnline