@article{764824,
      author = {Lindroos, Veikko.},
      url = {http://library.usi.edu/record/764824},
      title = {Handbook of silicon based MEMS materials and technologies  [electronic resource] /},
      publisher = {William Andrew/Elsevier,},
      recid = {764824},
      pages = {xxxii, 636 p. :},
      address = {Amsterdam ;},
      year = {2010},
}