TY  - GEN
T1  - Handbook of silicon based MEMS materials and technologies
DA  - 2010.
CY  - Amsterdam ;
CY  - Boston :
AU  - Lindroos, Veikko.
ET  - 1st ed.
CN  - TK7875
PB  - William Andrew/Elsevier,
PP  - Amsterdam ;
PP  - Boston :
PY  - 2010.
ID  - 764824
KW  - Microelectromechanical systems.
KW  - Microelectromechanical systems
KW  - Silicon
TI  - Handbook of silicon based MEMS materials and technologies
LK  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10378866
UR  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10378866
ER  -