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000764824 020__ $$z9780815515944
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000764824 035__ $$a(CaPaEBR)ebr10378866
000764824 035__ $$a(OCoLC)667288128
000764824 040__ $$aCaPaEBR$$cCaPaEBR
000764824 05014 $$aTK7875$$b.H36 2010eb
000764824 24500 $$aHandbook of silicon based MEMS materials and technologies$$h[electronic resource] /$$cVeikko Lindroos ... [et al.].
000764824 250__ $$a1st ed.
000764824 260__ $$aAmsterdam ;$$aBoston :$$bWilliam Andrew/Elsevier,$$c2010.
000764824 300__ $$axxxii, 636 p. :$$bill.
000764824 4901_ $$aMicro & nano technologies
000764824 504__ $$aIncludes bibliographical references and index.
000764824 506__ $$aAccess limited to authorized users.
000764824 650_0 $$aMicroelectromechanical systems.
000764824 650_0 $$aMicroelectromechanical systems$$xMaterials.
000764824 650_0 $$aSilicon$$xElectric properties.
000764824 7001_ $$aLindroos, Veikko.
000764824 830_0 $$aMicro & nano technologies.
000764824 852__ $$bebk
000764824 85640 $$3ProQuest Ebook Central Academic Complete$$uhttps://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10378866$$zOnline Access
000764824 909CO $$ooai:library.usi.edu:764824$$pGLOBAL_SET
000764824 980__ $$aEBOOK
000764824 980__ $$aBIB
000764824 982__ $$aEbook
000764824 983__ $$aOnline