@article{774085,
      author = {Mertens, Paul, and Meuris, Marc, and Heyns, Marc,},
      url = {http://library.usi.edu/record/774085},
      title = {Ultra clean processing of semiconductor surfaces XII :  selected, peer reviewed papers from the 12th International  Symposium on Ultra Clean Processing of Semiconductor  Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium  /. International Symposium on Ultra Clean Processing of  Semiconductor Surfaces},
      recid = {774085},
      pages = {1 online resource (331 pages) :},
}