TY  - GEN
T1  - Ultra clean processing of semiconductor surfaces XII :selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium /
AU  - Mertens, Paul,
AU  - Meuris, Marc,
AU  - Heyns, Marc,
VL  - Volume 219
CN  - TK7871.85
ID  - 774085
KW  - Semiconductors
SN  - 9783038266266
TI  - Ultra clean processing of semiconductor surfaces XII :selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium /
LK  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10951269
UR  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10951269
ER  -