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000778951 020__ $$a9783319286884$$q(electronic book)
000778951 020__ $$a3319286889$$q(electronic book)
000778951 020__ $$z9783319286860
000778951 020__ $$z3319286862
000778951 035__ $$aSP(OCoLC)ocn968211901
000778951 035__ $$aSP(OCoLC)968211901
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000778951 049__ $$aISEA
000778951 050_4 $$aTK7875
000778951 08204 $$a621.381$$223
000778951 24500 $$aPiezoelectric MEMS resonators /$$cHarmeet Bhugra, Gianluca Piazza, editors.
000778951 264_1 $$aCham, Switzerland :$$bSpringer Nature,$$c[2017]
000778951 264_4 $$c©2017
000778951 300__ $$a1 online resource (424 pages) :$$billustrations
000778951 336__ $$atext$$btxt$$2rdacontent
000778951 337__ $$acomputer$$bc$$2rdamedia
000778951 338__ $$aonline resource$$bcr$$2rdacarrier
000778951 4901_ $$aMicrosystems and nanosystems
000778951 504__ $$aIncludes bibliographical references and index.
000778951 5050_ $$aAIN Thin Film Processing and Basic Properties -- Lead Zirconate Titanate (PZT) for M/NEMS -- Gallium Nitride for M/NEMS -- Lithium Niobate for M/NEMS Resonators -- Quality Factor and Coupling in Piezoelectric MEMS Resonators -- Flexural Piezoelectric Resonators -- Laterally Vibrating Piezoelectric MEMS Resonators -- BAW Piezoelectric Resonators -- Shear Piezoelectric MEMS Resonators -- Temperature Compensation of Piezo-MEMS Resonators -- Computational Modeling Challenges -- Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators -- Reliability and Quality Assessment (Stability and Packages) -- Large Volume Testing and Calibration -- High Frequency Oscillators for Mobile Devices -- BAW Filters and Duplexers for Mobile Communication.
000778951 506__ $$aAccess limited to authorized users.
000778951 520__ $$a"This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers"--Provided by publisher.
000778951 588__ $$aDescription based on print  version record.
000778951 650_0 $$aMicroelectromechanical systems.
000778951 650_0 $$aPiezoelectric devices.
000778951 7001_ $$aBhugra, Harmeet,$$eeditor.
000778951 7001_ $$aPiazza, Gianluca,$$eeditor.
000778951 77608 $$iPrint version:$$tPiezoelectric mems resonators.$$dCham, Switzerland : Springer Nature, [2017]$$z3319286862$$w(OCoLC)932095886
000778951 830_0 $$aMicrosystems and nanosystems.
000778951 852__ $$bebk
000778951 85640 $$3SpringerLink$$uhttps://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-319-28688-4$$zOnline Access$$91397441.1
000778951 909CO $$ooai:library.usi.edu:778951$$pGLOBAL_SET
000778951 980__ $$aEBOOK
000778951 980__ $$aBIB
000778951 982__ $$aEbook
000778951 983__ $$aOnline
000778951 994__ $$a92$$bISE