Introduction
High-k dielectric for nanoscale MOS devices
Performance, optimization, and reliability of FinFET devices
Performance, optimization, and challenges of emerging nanowire field-effect transistors
Graphene technology for future MEMS and sensor applications
Nanoscale sensors for next-generation optical transceiver applications
Nanoscale MEMS for future optical communication applications
Nanoscale devices for biomedical applications
Effect of nanoscale structure on reliability of nano devices and sensors
Compact modeling of nano devices and sensors
Three-dimensional TCAD simulation of nano semiconductor devices
Fabrication of nano devices based on novel material
Novel processing technology for fabricating nano devices and sensors
Conclusions.