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Preface; Acknowledgements; Contents; Abbreviations; 1 Introduction to the Priority Programme SPP1476-Small Machine Tools for Small Workpieces; Abstract; 1 Historical Development of Machine Tools and Production Engineering; 2 Idea and Motivation of the Priority Programme SPP1476; 3 Project Partners of the SPP1476; 4 Organisational Structure; 4.1 Communication; 4.2 Harmonisation; 4.3 Standardisation; 5 How Modules Are Combined to a Small Machine Tool for Micro Manufacturing; 6 Sample Machine Tool Configurations; 7 External Visibility and Publications of SPP1476; 8 Summary and Outlook

3.2 Control Architecture3.3 System Performance Limits in Operation; 3.4 Machining Results; 4 Summary and Outlook; References; 4 Compact Module for Maskless and Simultaneous 2D Laser Chemical Machining; Abstract; 1 Introduction; 2 Digital Micromirror Device: Technology; 3 DMD-Jet: From a Large Prototype to a Compact Machine Tool; 4 DMD Characterisation; 4.1 Diffraction Efficiency; 4.2 Imaging Quality; 5 DMD-Based Laser Chemical Machining: Quality and Limitations; 5.1 Intensity Threshold of Laser Chemical Machining of Metals; 5.2 Quality of Laser Chemical Removal

6 Optical Modelling of DMD Projection6.1 Model Description; 6.2 Verification of Imaging Quality; 7 Conclusions and Outlook; References; GrindBall
A Novel Drive and Bearing Concept for Micro Grinding Tools; 1 Introduction; 2 The GrindBall Concept and Design Requirements; 3 Simulation and Dimensioning of Module and Main Functions; 3.1 Dimensioning and Simulation of the Electromagnetic Bearing; 3.2 Numerical Study of the Hydraulic Propulsion Concept; 4 Experimental Validation of the Numerical Results for the Fluidic Tool Drive; 5 Effect of Environmental Air on the Grinding Force

6 Implementation of Machining Technology6.1 Manufacturing of Spherical Grinding Tools; 6.2 Force Controlled Grinding; 6.3 System Integration; 7 Summary and Outlook; References; Actuators; 6 Design and Experimental Validation of a Hybrid Actuator Based on Piezoceramics and Shape-Memory-Alloys; Abstract; 1 Introduction; 2 SMA Actuator; 2.1 SMA Actuating Principle; 2.2 SMA Actuator Design; 2.3 SMA Control Concept; 3 Piezo Actuator; 3.1 Piezo Actuator Design; 3.2 Piezo Actuator Control Concept; 4 Hybrid Actuator; 4.1 Hybrid Actuator Design; 4.2 Hybrid Actuator Control Concept

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