Measurement technology for micro-nanometer devices / Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue.
Zhang, Wendong, author.; ProQuest (Firm)
2017
TA418.9.N35 Z445 2017
Available Online

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Title Measurement technology for micro-nanometer devices / Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue.
Author Zhang, Wendong, author.
ISBN 9781118717998 electronic publication
1118717996 electronic publication
9781118717981 electronic book
1118717988 electronic book
9781118717974 electronic book
111871797X electronic book
9781118717967
1118717961
Published Solaris South Tower, Singapore : John Wiley & Sons, Singapore Pte. Ltd., 2017.
Copyright ©2017
Language English
Description 1 online resource ( xii, 329 pages)
Call Number TA418.9.N35 Z445 2017
Dewey Decimal Classification 681/.2
Bibliography, etc. Note Includes bibliographical references and index.
Access Note Access limited to authorized users
Reproduction Electronic reproduction. Ann Arbor, MI Available via World Wide Web.
Source of Description Description based on online resource; title from digital title page (viewed on February 09, 2017).
Added Corporate Author ProQuest (Firm)
Available in Other Form Measurement technology for micro-nanometer devices
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Record Appears in Online Resources > Ebooks
All Resources
Geometry Measurements at the Micro/Nanoscale
Dynamic Measurements at the Micro/Nanoscale
Mechanical Characteristics Measurements
SPM for MEMS/NEMS Measurements
MEMS Online Measurements
Typical Micro/Nanoscale Device Measurements.

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