@article{801138, recid = {801138}, author = {Pampillón Arce, María Ángela.}, title = {Growth of high permittivity dielectrics by high pressure sputtering from metallic targets /}, publisher = {Springer,}, address = {Cham :}, pages = {1 online resource.}, year = {2017}, note = {"Doctoral thesis accepted by the Complutense University of Madrid, Spain."}, url = {http://library.usi.edu/record/801138}, doi = {https://doi.org/10.1007/978-3-319-66607-5}, }