TY - GEN DO - 10.1007/978-3-319-66607-5 DO - doi T1 - Growth of high permittivity dielectrics by high pressure sputtering from metallic targets / DA - 2017. CY - Cham : AU - Pampillón Arce, María Ángela. CN - SpringerLink CN - TK7871.99.M44 PB - Springer, PP - Cham : PY - 2017. N1 - "Doctoral thesis accepted by the Complutense University of Madrid, Spain." ID - 801138 KW - Metal oxide semiconductor field-effect transistors. SN - 9783319666075 SN - 331966607X TI - Growth of high permittivity dielectrics by high pressure sputtering from metallic targets / LK - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-319-66607-5 UR - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-319-66607-5 ER -