TY - GEN AU - Pampillón Arce, María Ángela. CN - SpringerLink CN - TK7871.99.M44 CY - Cham : DA - 2017. DO - 10.1007/978-3-319-66607-5 DO - doi ID - 801138 KW - Metal oxide semiconductor field-effect transistors. LK - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-319-66607-5 N1 - "Doctoral thesis accepted by the Complutense University of Madrid, Spain." PB - Springer, PP - Cham : PY - 2017. SN - 9783319666075 SN - 331966607X T1 - Growth of high permittivity dielectrics by high pressure sputtering from metallic targets / TI - Growth of high permittivity dielectrics by high pressure sputtering from metallic targets / UR - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-319-66607-5 ER -