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Title
Growth of high permittivity dielectrics by high pressure sputtering from metallic targets / María Ángela Pampillón Arce.
ISBN
9783319666075 (electronic book)
331966607X (electronic book)
9783319666068
3319666061
Imprint
Cham : Springer, 2017.
Language
English
Description
1 online resource.
Other Standard Identifiers
10.1007/978-3-319-66607-5 doi
Call Number
TK7871.99.M44
Dewey Decimal Classification
621.3815/284
Note
"Doctoral thesis accepted by the Complutense University of Madrid, Spain."
Bibliography, etc. Note
Includes bibliographical references.
Access Note
Access limited to authorized users.
Source of Description
Description based on print version record.
Series
Springer theses.
Available in Other Form
Print version: 3319666061
Introduction
Fabrication Techniques
Characterization Techniques
Thermal Oxidation of Gd2o3
Plasma Oxidation of Gd2o3 and Sc2o3
Gadolinium Scandate
Interface Scavenging
Gd2o3 on Inp Substrates
Conclusions and Future Work.
