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Growth of high permittivity dielectrics by high pressure sputtering from metallic targets / María Ángela Pampillón Arce.

Pampillón Arce, María Ángela.
2017
TK7871.99.M44
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Title
Growth of high permittivity dielectrics by high pressure sputtering from metallic targets / María Ángela Pampillón Arce.
Author
Pampillón Arce, María Ángela.
ISBN
9783319666075 (electronic book)
331966607X (electronic book)
9783319666068
3319666061
DOI
https://doi.org/10.1007/978-3-319-66607-5
Publication Details
Cham : Springer, 2017.
Language
English
Description
1 online resource.
Item Number
10.1007/978-3-319-66607-5 doi
Call Number
TK7871.99.M44
Dewey Decimal Classification
621.3815/284
Note
"Doctoral thesis accepted by the Complutense University of Madrid, Spain."
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Includes bibliographical references.
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Description based on print version record.
Series
Springer theses.
Available in Other Form
Print version: 3319666061
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Introduction
Fabrication Techniques
Characterization Techniques
Thermal Oxidation of Gd2o3
Plasma Oxidation of Gd2o3 and Sc2o3
Gadolinium Scandate
Interface Scavenging
Gd2o3 on Inp Substrates
Conclusions and Future Work.

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