Nanofabrication using focused ion and electron beams [electronic resource] : principles and applications / edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.
2011
TA418.9.N35 N2525 2011
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Title
Nanofabrication using focused ion and electron beams [electronic resource] : principles and applications / edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.
ISBN
9780199734214
9780199920990
9780199920990
Publication Details
Oxford ; New York : Oxford University Press, 2011.
Language
English
Description
xvi, 813 p.
Call Number
TA418.9.N35 N2525 2011
Dewey Decimal Classification
620.1/15
Access Note
Access limited to authorized users.
Series
Nanomanufacturing series ; v. 1
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