Silicon anodization as a structuring technique : literature review, modeling and experiments / Alexey Ivanov.
Ivanov, Alexey.
2018
QD273
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Title
Silicon anodization as a structuring technique : literature review, modeling and experiments / Alexey Ivanov.
Author
Ivanov, Alexey.
ISBN
9783658192389 (electronic book)
3658192380 (electronic book)
3658192372
9783658192372
DOI
https://doi.org/10.1007/978-3-658-19238-9
Publication Details
Wiesbaden, Germany : Springer Vieweg, [2018]
Language
English
Description
1 online resource.
Item Number
10.1007/978-3-658-19238-9 doi
Call Number
QD273
Dewey Decimal Classification
541/.393
Summary
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. ​
Bibliography, etc. Note
Includes bibliographical references.
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Access limited to authorized users.
Digital File Characteristics
text file PDF
Source of Description
Vendor-supplied metadata.
Available in Other Form
Print version: 9783658192372
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Record Appears in
Online Resources > Ebooks
All Resources
Silicon Anodization: State of the Art
Experimental, Characterization and Simulation Methods
Microscale Study of Anodization Process
Anodization Process as a Structuring Technique: Experiments and Simulation.

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