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000823636 019__ $$a1004225436$$a1004662985$$a1008874116$$a1011791648
000823636 020__ $$a9783658192389$$q(electronic book)
000823636 020__ $$a3658192380$$q(electronic book)
000823636 020__ $$z3658192372
000823636 020__ $$z9783658192372
000823636 0247_ $$a10.1007/978-3-658-19238-9$$2doi
000823636 035__ $$aSP(OCoLC)on1004365818
000823636 035__ $$aSP(OCoLC)1004365818$$z(OCoLC)1004225436$$z(OCoLC)1004662985$$z(OCoLC)1008874116$$z(OCoLC)1011791648
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000823636 049__ $$aISEA
000823636 050_4 $$aQD273
000823636 08204 $$a541/.393$$223
000823636 1001_ $$aIvanov, Alexey.
000823636 24510 $$aSilicon anodization as a structuring technique :$$bliterature review, modeling and experiments /$$cAlexey Ivanov.
000823636 260__ $$aWiesbaden, Germany :$$bSpringer Vieweg,$$c[2018]
000823636 300__ $$a1 online resource.
000823636 336__ $$atext$$btxt$$2rdacontent
000823636 337__ $$acomputer$$bc$$2rdamedia
000823636 338__ $$aonline resource$$bcr$$2rdacarrier
000823636 347__ $$atext file$$bPDF$$2rda
000823636 504__ $$aIncludes bibliographical references.
000823636 5050_ $$aSilicon Anodization: State of the Art -- Experimental, Characterization and Simulation Methods -- Microscale Study of Anodization Process -- Anodization Process as a Structuring Technique: Experiments and Simulation.
000823636 506__ $$aAccess limited to authorized users.
000823636 520__ $$aAlexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. ​
000823636 588__ $$aVendor-supplied metadata.
000823636 650_0 $$aElectrolytic oxidation.
000823636 650_0 $$aSilicon.
000823636 77608 $$iPrint version: $$z3658192372$$z9783658192372$$w(OCoLC)994692204
000823636 852__ $$bebk
000823636 85640 $$3SpringerLink$$uhttps://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-658-19238-9$$zOnline Access$$91397441.1
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000823636 980__ $$aBIB
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000823636 983__ $$aOnline
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